ISM-6A Induced Signal Monitor
Data sheet, features and applications for the ISM-6A.
EBIC / Semiconductor
ISM-6A Induced Signal Monitor
Used mainly in EBIC mode (electron beam induced current), the ISM-6A is employed together with a scanning electron microscope to image electrically active defects in semiconductor materials and devices.
Long regarded as the industry leader, the ISM series offers both quantitative and qualitative facilities, the former enabling device parameters and materials data to be obtained. The ISM-6A builds on the original ISM-5 unit, which remains in use in research labs worldwide.
Features
- Induced current and/or voltage options via dedicated current or voltage preamplifier units
- Internal bias source, −100V to +100V, resolution to 0.1mV
- Large back-off current range, −20mA to +20mA, digitally displayed with resolutions from 1µA to 0.1pA
- Wide bandwidth: 3kHz at 0.1pA resolution, 320kHz at 100nA resolution
- Complete microprocessor control with PC interface via LabVIEW drivers
- Intuitive interface with adjustable backlight for use in reduced ambient light
Applications
- Characterisation and observation of junction areas
- Failure analysis (FA) of semiconductor devices
- Locating areas of ESD (electrostatic discharge) damage
- Quality control and assurance (QA) of semiconductors
- Detecting subsurface damage or defects
- Also used for OBIC, EBIV, SOM/SEM and CL (transmitted or emitted) studies